Microstructure for vibratory gyroscope
US5450751A · kind A · utility
86Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 1993 |
| Grant date | Sep 19, 1995 |
| Priority date | — |
| Expiry date | May 4, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microstructure for a vibratory gyroscope has a ring portion supported in such a fashion to allow substantially undamped, high-Q radial vibration. The ring portion is electrically conductive and comprises a charge plate for a plurality of radially disposed charge conductive sites around its perimeter for sensing radial displacements thereof. The ring, its support and charge conductive sites are formed within sacrificial molds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.