Spinning plate for substrates

US5452905A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Gudrun Bohmer · Stuttgart, DE
• Josef Gentischer · Winnenden, DE
• Rolf Lehner · Eßlingen, DE
• Dieter Modjesch · Nufringen, DE
• Wolfgang Schmutz · Rottweil, DE

Key dates

• Filing date: Feb 7, 1994
• Grant date: Sep 26, 1995
• Expiry date: Feb 7, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T279/11
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A spinning plate for substrates has on the surface of its spinning disk a continuous seal that is pressed from below against the edge of the substrate. The substrate can thus be retained by suction on the spinning disk. In order to center the substrate, a pressing element is moved under suction against the edge of the substrate and presses the same against centering stops of supporting blocks.