Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique
US5453233A · kind A · utility
8Cited by
8References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 5, 1993 |
| Grant date | Sep 26, 1995 |
| Priority date | — |
| Expiry date | Apr 5, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/01
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and device are provided for reducing the loss of CVD manufactured parts due to cracking caused by mechanical stresses resulting from the mismatch of the coefficient of thermal expansion between the chemical vapor deposed part and the mandrel plate. The method and device provide a removable mandrel support which is removed after the chemical vapor deposition but prior to the cooling of the CVD part and the mandrel plates. This permits the CVD part to contract upon cooling without mechanical restriction, thus reduce cracking caused by contraction of the CVD part against a mold which does not contract substantially.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.