Unitary micro-flexure structure and method of making same
US5453315A · kind A · utility
32Cited by
20References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1992 |
| Grant date | Sep 26, 1995 |
| Priority date | — |
| Expiry date | Dec 14, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24917
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable boundary-defining structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.