Laser-beam annealing apparatus
US5454347A · kind A · utility
46Cited by
6References
6Claims
0Family size
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Key dates
| Filing date | Jul 2, 1993 |
| Grant date | Oct 3, 1995 |
| Priority date | — |
| Expiry date | Jul 2, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1016
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A laser-beam annealing apparatus that provides reliable, continuous control of the intensity of the laser beam used to perform the annealing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.