Robot prealigner
US5456561A · kind A · utility
39Cited by
166References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 1994 |
| Grant date | Oct 10, 1995 |
| Priority date | — |
| Expiry date | Jul 12, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J13/088
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.