System and method for multilayer film production on tape substrate
US5460853A · kind A · utility
14Cited by
16References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 1994 |
| Grant date | Oct 24, 1995 |
| Priority date | — |
| Expiry date | May 24, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/85
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of sequential deposition of source materials onto a web substrate. A substrate transfer mechanism imparts continuous movement of a substrate past a plurality of deposition sources during vapor deposition of deposition source materials. Every portion of the substrate is exposed to deposition fluxes from the deposition sources in an alternating periodic manner. The number of source exposures is greater than the number of sources.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.