Patent · US Expired

Method for pulling single crystals

US5462011A · kind A · utility

11Cited by

6References

8Claims

0Family size

Assignee

Wacker-Chemitronic Gesellschaft fur Elektronik Grundstoffe mbH · DE

Inventors

Erich Tomzig · Altötting, DE
Reinhard Wolf · Isny im Allgäu, DE
Wolfgang Hensel · Langenfeld, DE

Key dates

Filing date	May 25, 1994
Grant date	Oct 31, 1995
Priority date	—
Expiry date	May 25, 2014

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T117/1068
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method and apparatus for pulling single crystals from a melt of semicontor material, in which a monocrystalline seed crystal grows to form a single crystal, the seed crystal being dipped into the melt and raised in a controlled manner in the vertical direction with respect to the melt, while the melt forms a molten pool which is held on a support body only by the surface tension and by electromagnetic forces due to an induction coil. This method includes recharging the melt with semiconductor material in solid or liquid form during the growth of the single crystal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.