Micro-hotplate devices and methods for their fabrication

US5464966A · kind A · utility

Assignee

• Government of the United States of America, as represented by the Secretary of Commerce · US

Inventors

• Michael Gaitan · North Potomac, US
• John S. Suehle · Westminster, US
• Stephen Semancik · Mount Airy, US
• Richard E. Cavicchi · Washington Grove, US

Key dates

• Filing date: Oct 26, 1992
• Grant date: Nov 7, 1995
• Expiry date: Oct 26, 2012

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05B2213/07
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A design and fabrication methodology, for silicon micromachined micro-hotplates which are manufactured using commercial CMOS foundries techniques with additional post-fabrication processing. The micro-hotplates are adaptable for a host of applications. The methodology for the fabrication of the micro-hotplates is based on commercial CMOS compatible micromachining techniques. The novel aspects of the micro-hotplates are in the design, choice and layout of the materials layers, and the applications for the devices. The micro-hotplates have advantages over other similar devices in the manufacture by a standard CMOS process which include low-cost and easy integration of VLSI circuits for drive, communication, and control. The micro-hotplates can be easily incorporated into arrays of micro-hotplates each with individualized circuits for control and sensing for independent operation.