X-ray imaging system and solid state detector therefor
US5464984A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 9, 1995 |
| Grant date | Nov 7, 1995 |
| Priority date | — |
| Expiry date | Jan 9, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An x-ray detector includes a scintillator, a sensor array, processing circuits, and a ceramic layer. The ceramic layer overlays the processing circuits. The pixel architecture of the detector utilizes a technique similar to a CCD array to shift data from the array. The detector preferably utilizes 4-side abuttable sensor arrays having imbedded shift registers and bond pads superimposed over the pixel array in the upper metallization layers of the sensor. An alternative embodiment incorporates a silicon-on-insulator substrate to produce a monolithic large area substrate and a contiguous uninterrupted pixel array over the entire imaging surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.