Sensor head for use in atomic force microscopy and method for its production

US5465611A · kind A · utility

Assignee

• IMM Institut Fur Mikrotechnik GmbH · DE

Inventors

• Alexander Ruf · Dresden, DE
• Michael Abraham · Boulder, US
• Manfred Lacher · Mainz, DE
• Thomas Zetterer · Bad Kreuznach, DE
• Thomas Dietrich · Bôle, CH

Key dates

• Filing date: Mar 30, 1994
• Grant date: Nov 14, 1995
• Expiry date: Mar 30, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/863
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor head (1) is described, which has a spacer (5b) between a carrier element (2) and the spring arm (7), which, perhaps carries a sensor tip (9) at the free end; the spacer defines the distance d between the spring arm (7) and the carrier element (2). In a preferred embodiment, the spacer (5b) comprises a sacrificial layer (5a), which is etched out, except for the spacer (5b), after the formation of a corresponding layer system between the spring arm (7) and the carrier element (2). The carrier element (2) and the spring arm (7) are each provided with a reflecting layer (4 and 6). In accordance with another specific embodiment, plasmonactive layers can also be provided.