Pulsed gas discharge Xray laser
US5467362A · kind A · utility
19Cited by
6References
21Claims
0Family size
Inventor
Key dates
| Filing date | Aug 3, 1994 |
| Grant date | Nov 14, 1995 |
| Priority date | — |
| Expiry date | Aug 3, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S4/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high current, pulsed, high repetition rate, electric discharge, extreme ultraviolet and Xray laser. The low inductance discharge bore is constructed from a plurality of discs (18). The bore segments are separated from one another by spacers constructed from a refractory electrical insulator (20). The components in contact with the gas discharge are constructed from high temperature materials with low sputtering rates and low rates of ion burial. Gas return holes (74) are provided in the bore segments discs. Xray reflecting mirrors form an optical cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.