Functional vacuum microelectronic field-emission device
US5469015A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 1994 |
| Grant date | Nov 21, 1995 |
| Priority date | — |
| Expiry date | Apr 13, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J3/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vacuum microelectronic field-emission device includes: a substrate; an emitter portion formed to have at least an wedge portion extending in parallel to the substrate, the emitter portion being supported by the substrate; a gate portion formed a first given distance apart from the tip of the emitter portion, the gate portion being supported by the substrate, the gate portion being electrically insulated from the emitter portion; and a collector portion formed a second given distance apart from a tip of the emitter portion, the collector portion being supported by the substrate, the second given distance is equal to or larger than the first given distance, the collector portion being electrically insulated from the emitter portion and the gate portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.