Electrically blowable fuse structure manufacturing for organic insulators
US5469981A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1994 |
| Grant date | Nov 28, 1995 |
| Priority date | — |
| Expiry date | Oct 14, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K1/0263
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrically blowable fuse structure usable with organic insulators in microelectronic parts is provided. The fuse structure is made of a first heat resistant member, a fusing element and a second heat resistant member. The heat resistant members are in substantial contact with the fuse and thermally insulate the fuse from the organic insulator. The ends of each fuse are electrically connected to a pair conductors. A process for fabricating an electrically blowable fuse structure usable with an organic insulator is provided. A substrate with an organic insulator coating and containing electrically conductive features with exposed contacts is provided. A heat shield layer and a fuse layer are deposited sequentially and patterned by subtractive etching. Plurality of conductors are formed over so as to electrically connect each fuse element to a pair of conductors. A second heat resistant member is formed over the fuse area and the substrate is subsequently quoted with an organic insulator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.