Precision machining method, precision machining apparatus and data storage apparatus using the same
US5471064A · kind A · utility
16Cited by
9References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1993 |
| Grant date | Nov 28, 1995 |
| Priority date | — |
| Expiry date | Sep 14, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/947
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.