Method and apparatus for measuring size of particle or defect
US5471298A · kind A · utility
27Cited by
10References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 25, 1993 |
| Grant date | Nov 28, 1995 |
| Priority date | — |
| Expiry date | Mar 25, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8477
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.