Quartz thickness-shear mode resonator temperature-compensated pressure transducer with matching thermal time constants of pressure and temperature sensors
US5471882A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 31, 1993 |
| Grant date | Dec 5, 1995 |
| Priority date | — |
| Expiry date | Aug 31, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/085
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer assembly for measuring fluid pressure. The transducer assembly includes a thickness-shear mode resonator pressure sensor and a thickness-shear mode resonator temperature sensor for temperature compensation of the pressure sensor. Both sensors are exposed to the pressurized fluid, and possess similar thermal time constants. The temperature sensor possesses a pressure sensitivity less than that of the pressure sensor, and a temperature sensitivity greater than that of the pressure sensor. The pressure and temperature sensors may be of similar size and configuration, and may be fabricated from the same material, such as quartz.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.