Specimen holder and apparatus for two-sided ion milling system
US5472566A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1994 |
| Grant date | Dec 5, 1995 |
| Priority date | — |
| Expiry date | Nov 14, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0.degree., from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen. The specimen is secured to the at least one specimen support arm, preferably, so as to permit ion beams to be directed at the first and second major surfaces of the specimen simultaneously at very low angles of incidence down to 0.degree.. Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.