Container for a wafer chip
US5474177A · kind A · utility
35Cited by
17References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1994 |
| Grant date | Dec 12, 1995 |
| Priority date | — |
| Expiry date | Oct 14, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67386
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A container for a silicon wafer chip includes a body having a bed for the chip, a plurality of posts defining a lateral perimeter for the chip, and a cap having fingers for maintaining the vertical position of the chip in the container. The bed is sloped from the outer wall to an inner line so that an edge of the chip only is supported on a shoulder. The container includes a sealing arrangement to keep moisture and particle contaminants from the interior.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.