Patent · US Expired

Arrangement having multilevel wiring structure used for electronic component module

US5475264A · kind A · utility

56Cited by
2References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 28, 1993
Grant dateDec 12, 1995
Priority date
Expiry dateJul 28, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

According to this invention, there is provided a multilevel wiring substrate comprising, a base substrate having first and second surface and including first and second areas, said first area including first and second level conductive layers insulated from each other, a plurality of first vertical conductive layers electrically connected to said first level conductive layer so as to provide first end portions exposed to said first surface, and a plurality of second vertical conductive layers electrically connected to said second level conductive layer so as to provide second end portions exposed to said first surface, said first and second end portions being alternately arranged in row and column directions, and said second area including third and fourth conductive layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.