Transportable image emission microscope
US5475316A · kind A · utility
143Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1993 |
| Grant date | Dec 12, 1995 |
| Priority date | — |
| Expiry date | Dec 27, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0016
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An emission microscope is mounted on a transportable structure for use on a test floor and encloses or garages an entire automatic test equipment head to facilitate high-speed testing. Test procedures allow development of static/fixed defects over time. A video mask can be developed based on emission sites on known good devices so that only emission from defect sites of bad devices under test are shown.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.