Microprobe
US5475318A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Oct 29, 1993 |
| Grant date | Dec 12, 1995 |
| Priority date | — |
| Expiry date | Oct 29, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microprobe comprises a base, a microcantilever extending in a plane from the base, and a probe tip projecting from the microcantilever out of the plane. The microcantilever is a bimorph structure comprising first and second layers made from materials having different coefficients of thermal expansion, and an integrated heated element for supplying heat to the microcantilever. The probe tip is made from silicon and comes to a radius that can be controlled to atomic sharpness (<1 nm) if desired. Alternatively, the probe tip is a planar structure. Desirably, the microcantilever is made from a metal, such as aluminum, and silicon oxide as the materials of the two layers. The heating element comprises a line or ribbon of a conductive material, such as polysilicon which is in contact with one of the two layers, and supplies heat, thereby causing the probe tip to traverse an arc and bring it into contact with a material under investigation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.