Method for producing a hybrid integrated optical circuit and device for emitting light waves
US5475775A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 1994 |
| Grant date | Dec 12, 1995 |
| Priority date | — |
| Expiry date | Sep 13, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48463
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for producing a hybrid integrated optical circuit which utilizes a molding tool having holding devices for an electrooptic semiconductor component, negative molds for a waveguide trench and holding devices for an optical waveguide. The holding devices of the molding tool adjust the electrooptic semiconductor component with respect to the negative mold of the waveguide trench during reshaping with a polymer. The basic unit produced consists of the electrooptic semiconductor component, which is adjusted with respect to the waveguide trench molded in the polymer. Adjoining the waveguide trench are holding devices, which are molded in the polymer and by means of which an optical waveguide can be coupled to the waveguide trench in a self-adjusting fashion. The basic unit and the optical waveguide are permanently connected to one another with the aid of a cover, the waveguide trench being filled with an optically transparent material, as a result of which a waveguide is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.