Reinforced semiconductor wafer holder
US5476176A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 1994 |
| Grant date | Dec 19, 1995 |
| Priority date | — |
| Expiry date | May 23, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The device includes a cover with a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. It also includes a purging means attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder. The holder has contoured recess-forming pairs that do not effect semiconductor wafer transfer when the recess forming pairs are warped. The recess-forming pairs also have integrally corresponding ribs that help prevent warpage of the contoured recess-forming pairs during the plastic injection molding process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.