Patent · US Expired

Developer preparing apparatus and developer preparing method

US5476320A · kind A · utility

20Cited by
11References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 9, 1994
Grant dateDec 19, 1995
Priority date
Expiry dateNov 9, 2014

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/0329
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A developer preparing apparatus for obtaining a developer containing a developer component having a definite content by mixing an undiluted developer solution containing 5 to 40% by weight of tetramethylammonium hydroxide (TMAH) and pure water, and a developer preparing method for preparing the developer using the developer preparing apparatus. The developer preparing apparatus comprising a mixing bath equipped with a means for receiving and mixing an undiluted developer solution and pure water, an ultrasonic densitometer for measuring the developer component contained in the developer in the mixing bath, a flow rate controlling means for controlling the supplying flow rate of the undiluted developer solution and/or pure water into the mixing bath by the output signal from the ultrasonic densitometer, and a storage tank for receiving and storing the developer containing the developer component having the definite content in the mixing bath.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.