Developer preparing apparatus and developer preparing method
US5476320A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1994 |
| Grant date | Dec 19, 1995 |
| Priority date | — |
| Expiry date | Nov 9, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0329
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A developer preparing apparatus for obtaining a developer containing a developer component having a definite content by mixing an undiluted developer solution containing 5 to 40% by weight of tetramethylammonium hydroxide (TMAH) and pure water, and a developer preparing method for preparing the developer using the developer preparing apparatus. The developer preparing apparatus comprising a mixing bath equipped with a means for receiving and mixing an undiluted developer solution and pure water, an ultrasonic densitometer for measuring the developer component contained in the developer in the mixing bath, a flow rate controlling means for controlling the supplying flow rate of the undiluted developer solution and/or pure water into the mixing bath by the output signal from the ultrasonic densitometer, and a storage tank for receiving and storing the developer containing the developer component having the definite content in the mixing bath.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.