Magneto-optical recording medium
US5476713A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1993 |
| Grant date | Dec 19, 1995 |
| Priority date | — |
| Expiry date | Aug 26, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A magneto-optical recording medium having at least two kinds of films consisting of a rare earth metal-transition metal alloy thin film and a dielectric film formed on a substrate. The dielectric film is formed by sputtering a target in an atmosphere containing at least an oxygen gas or a compound gas containing oxygen as one constitutional element. Particularly, the use of a carbon dioxide gas CO.sub.2 or a carbon monoxide gas CO provides for an SiCON film rather than an Si.sub.3 N.sub.4 film. The SiCON film has a refractive index and an absorptivity almost identical with those of the Si.sub.3 N.sub.4 film, and has a thermal conductivity smaller than that of the Si.sub.3 N.sub.4 film. As a result, it has been found that the SiCON film is advantageous from the viewpoints of a magnetic field sensitivity and a film thickness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.