Phenylacetates and their use in radiation sensitive compositions
US5476751A · kind A · utility
2Cited by
3References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 14, 1994 |
| Grant date | Dec 19, 1995 |
| Priority date | — |
| Expiry date | Oct 14, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0045
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The invention relates to compounds of formula I ##STR1## wherein A is a radical of formula ##STR2## R.sub.1 and R.sub.2 are each independently of the other hydrogen, C.sub.1 --C.sub.4 alkyl, C.sub.1 C.sub.4 alkoxy, halogen or a radical of formula ##STR3## wherein X is --O--, --CH.sub.2 --, --C(CH.sub.3).sub.2 -- or --SO.sub.2 --, and R.sub.3 and R.sub.4 are each independently of the other hydrogen, C.sub.1 --C.sub.4 alkyl or phenyl, as well as compositions comprising these compounds. The compositions are particularly suitable for making integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.