Method of making a thin film detector with an aerogel layer
US5478425A · kind A · utility
0Cited by
6References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 16, 1994 |
| Grant date | Dec 26, 1995 |
| Priority date | — |
| Expiry date | Sep 16, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention is related to electronic and more specifically to photo-electronic devices manufactured by means of thin film layering techniques. The invention proposes the use of polymer, copolymer, polyamide and similar organic casting materials, in layers 500 to 10,000 angstroms thick, as protective barriers between layers where the processing of one layer would be adversely affected by or would damage an adjacent previously formed layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.