Method of making an electronic device having an integrated inductor
US5478773A · kind A · utility
126Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 1995 |
| Grant date | Dec 26, 1995 |
| Priority date | — |
| Expiry date | May 26, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic device (10) comprises a copper integrated inductor (11) overlying other solid state components (31) of the device (10). Preferably, the copper inductor (11) is formed of plated copper to a thickness of several microns. The preferred integrated inductor (11) provides significant advantage over external inductors of the past with respect to simplicity of manufacture as well as system size and cost. Additionally, the preferred inductor (11) provides improved inductance per area, lower series resistance and higher Q values, relative to inductors of the past.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.