Magnetic system and method for uniformly scanning heavy ion beams
US5481116A · kind A · utility
38Cited by
19References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 10, 1994 |
| Grant date | Jan 2, 1996 |
| Priority date | — |
| Expiry date | Jun 10, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31701
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A magnetic system for uniformly scanning an ion beam comprising a magnetic structure having poles with associated scanning coils and respective pole faces that define therebetween a gap through which the ion beam passes; and a magnetic circuit for producing in the gap a magnetic field of sufficient magnitude to prevent the occurrence of a recently observed plasma effect in which the transverse cross-section of the ion beam substantially fluctuates in size while the ion beam is being scanned across the selected surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.