Pressure information processing system suitable for use in a vacuum unit
US5481482A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 1994 |
| Grant date | Jan 2, 1996 |
| Priority date | — |
| Expiry date | Aug 22, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D16/024
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In a vacuum unit which can electrically process information, a vacuum pressure value is detected by a detecting device and a desired pressure value is set by a setting device. The so-set desired pressure value is digitally displayed on a displaying device and stored in a storing device. The set desired pressure value is compared with the detected vacuum pressure value by a determining device. When the result of comparison is brought to a given value, it is determined that an unusual or improper state has been developed. When the set desired pressure value and the detected vacuum pressure value coincide with each other in a predetermined range, a predetermined signal is produced from an output device. The displaying device is provided with an adjusting device capable of adjusting the state of visual recognition of each pressure value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.