Mechanical interface wafer container
US5482161A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 1994 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | May 24, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between locations such as SMIF processing stations. The pod includes a box having an open end and a box door which sealably engages and closes the open end. The box contains a removable carrier which seats on the box door and which has an open side for insertion and removal of the articles. The pod features a latching mechanism in the box door utilizing a star wheel with tips that rotate and extend out of slots in the box door into slots in the interior sidewalls of the box. The tips then move vertically downward to sealingly engage the box door to the box. The star wheel embraces a concentric cammed hub having angled cam surfaces engaged by cam follower pins extending radially inward from the star wheel. The star wheel is configured and positioned in the box door such that partial rotation rotates the tips from the interior of the box to extend outwardly of the slots. At the point of extension a stop further limits the rotation of the star wheel causing the cam followers to follow the cam surfa…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.