Process for the production of a microtip electron source
US5482486A · kind A · utility
16Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1994 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | Jun 27, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/319
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for forming a microtip electron source includes the steps of forming a first microtip electron source using a mask, determining deviations in the structure of the first microtip electron source from a structure which should theoretically have been obtained using the first mask, and then correcting the first mask used during fabrication of the first microtip electron source that are designed to generate additional deviations that compensate for the effects upon performance of the deviations determined in the first microtip electron source when subsequent microtip electron sources are fabricated using the mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.