Patent · US Expired

Cathode for coating a substrate

US5482610A · kind A · utility

3Cited by

9References

15Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Bernd Wolf · Niederkirchen, DE
Juergen Mueller · Berlin, DE
Hans Neudert · Alzenau, DE

Key dates

Filing date	Feb 22, 1993
Grant date	Jan 9, 1996
Priority date	—
Expiry date	Feb 22, 2013

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3458
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In a cathode system for coating a substrate (46), having a cathode which is connected to a direct-current and/or alternating-current source (high-frequency source) and is disposed in an evacuable coating chamber (2), and is electrically connected to a target (29) which is sputtered and whose sputtered particles deposit themselves on the substrate, a process gas is brought into the coating chamber. The cathode is formed from a substantially pot-like housing (3) whose solid bottom (39) is fixedly joined to the target (29) and whose open end facing away from the target (29) is sealingly held in an opening (49) in the outer wall (30) of the coating chamber such that the interior (49) of the housing (3) is exposed to atmospheric pressure, while the target (29) and the outer surface of the shell-like part of the housing (3) joined thereto are affected by the pressure prevailing in the coating chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.