Method for diamond coating by microwave plasma
US5482748A · kind A · utility
8Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 1994 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | May 31, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/332
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for coating components such as cutting tools with diamond using a microwave plasma excited gas mixture in a reactor equipped with a bowl-shaped substrate table having a concave inner surface for supporting the components to be coated. The plasma forms a plasma ball during the coating operation and the geometrical shape, configuration and position of the table is adapted to stabilize the plasma and control the shape and position of the plasma in such a way that the outer surface of the plasma conforms substantially to the surfaces of the components to be coated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.