Unitary micro-flexure structure
US5483025A · kind A · utility
6Cited by
22References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 15, 1995 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | May 15, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/484
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable surface-boundary-defining structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.