Electron beam microanalyzer
US5483065A · kind A · utility
12Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 1994 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | Oct 12, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an electron beam microanalyzer which has an electron beam irradiation system for irradiating a surface of a sample in a chamber an with electron beam and an optical microscope capable of observing the sample, an electron beam deflecting coil is provided. The beam is emitted by the electron beam irradiation system in a direction oblique to the sample surface and the electron beam deflecting coil bends the electron beam to align the electron beam to the optical axis of the optical microscope, the optical axis being perpendicular to the sample surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.