X-ray interface and condenser
US5485498A · kind A · utility
2Cited by
7References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1994 |
| Grant date | Jan 16, 1996 |
| Priority date | — |
| Expiry date | Jul 1, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An x-ray interface (40) provides increased x-ray collection efficiency for use in x-ray photolithography. The interface (40) comprises a housing (44) having a plurality of mirrored funnels (46) for collecting the x-rays. The mirrored funnels (46) are shaped to partially collimate and focus the x-rays. The interface (40) collects a greater percentage of the available x-rays from an x-ray source, and the interface (40) also permits a greater number of beamlines to be coupled to the x-ray source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.