Boron-containing organic group-V compounds useful for gas phase deposition of the group-V element on substrates

US5487357A · kind A · utility

Assignee

• Merck Patent GmbH · DE

Inventors

• Ludwig Pohl · Darmstadt, DE
• Herbert Schumann · Berlin, DE
• Christian Marschall · Reutlingen, DE

Key dates

• Filing date: Jan 28, 1994
• Grant date: Jan 30, 1996
• Expiry date: Jan 28, 2014

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/18
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

The invention relates to the use of boron-containing organic group-V compounds for the deposition of the elements of the Vth main group on substrates by gas-phase deposition.