Ultrasonic transducer and method for using same
US5488954A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Sep 9, 1994 |
| Grant date | Feb 6, 1996 |
| Priority date | — |
| Expiry date | Sep 9, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0692
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An improved ultrasonic transducer fabricated on a silicon base has a piezoelectric layer of polyvinylidene fluoride-trfluroethylene copolymer. The piezoelectric layer is sandwiched between two conductive electrodes, all of which are supported on a dielectric layer on top of the silicon base. At least one of the electrodes forms a Fresnel zone plate to focus the ultrasonic signals from the transducers. To improve the performance of the transducer, the silicon base behind the active area is removed, leaving the dielectric layer as a membrane to support the electrodes and the piezoelectric layer. The resulting void in the silicon base is filled with an acoustically matched backing, such as an epoxy, to enhance the wideband performance of the transducer. The transducer is especially suited for characterizing anatomical structures or features requiring very high resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.