Cleaning method using azeotropic mixtures of perfluoro-n-hexane with diisopropyl ether or isohexane and cleaning apparatus using same
US5490894A · kind A · utility
12Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1995 |
| Grant date | Feb 13, 1996 |
| Priority date | — |
| Expiry date | Apr 7, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D7/28
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Disclosed herein is a mixed solvent composition including perfluorohexane and isohexane or diisopropyl ether.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.