Apparatus for laser assisted thin film deposition

US5490912A · kind A · utility

Assignee

• The Regents of the University of California · US

Inventors

• Bruce E. Warner · Pleasanton, US
• William McLean, II · Oakland, US

Key dates

• Filing date: May 31, 1994
• Grant date: Feb 13, 1996
• Expiry date: May 31, 2014

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/28
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A pulsed laser deposition apparatus uses fiber optics to deliver visible output beams. One or more optical fibers are coupled to one or more laser sources, and delivers visible output beams to a single chamber, to multiple targets in the chamber or to multiple chambers. The laser can run uninterrupted if one of the deposition chambers ceases to operate because other chambers can continue their laser deposition processes. The laser source can be positioned at a remote location relative to the deposition chamber. The use of fiber optics permits multi-plexing. A pulsed visible laser beam is directed at a generally non-perpendicular angle upon the target in the chamber, generating a plume of ions and energetic neutral species. A portion of the plume is deposited on a substrate as a thin film. A pulsed visible output beam with a high pulse repetition frequency is used. The high pulse repetition frequency is greater than 500 Hz, and more preferably, greater than about 1000 Hz. Diamond-like-carbon (DLC) is one of the thin films produced using the apparatus.