Multilayer CVD diamond films
US5491002A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 8, 1995 |
| Grant date | Feb 13, 1996 |
| Priority date | — |
| Expiry date | Mar 8, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Multilayer CVD diamond films are provided, wherein grain boundaries of the diamond layers are interrupted by renucleating and growing diamond on new nucleation sites comprised of metal. These nucleation sites are positioned on the interface between diamond layers. Methods for producing these multilayer CVD diamond films are also provided wherein the diamond growth on a substrate is interrupted by the deposition of metals which provide new nucleation sites. Diamond growth is then reinitiated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.