Charged beam apparatus
US5493125A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1994 |
| Grant date | Feb 20, 1996 |
| Priority date | — |
| Expiry date | Mar 7, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2005
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.