Patent · US Expired

Method and apparatus for inspection of solder joints by x-ray fluoroscopic imaging

US5493594A · kind A · utility

20Cited by
3References
31Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 7, 1994
Grant dateFeb 20, 1996
Priority date
Expiry dateMar 7, 2014

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N23/044
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus for inspecting a solder joint by an X-ray fluoroscopic image in which an X-ray is irradiated on an object to be inspected located by a specimen stage and having a lead of an electronic part soldered to a substrate to detect an X-ray fluoroscopic image signal, a position of a lead in a tip direction is obtained by a distribution of projection with said X-ray fluoroscopic image signal projected in a lead row direction, a position of a lead in a row direction is obtained by a distribution of projection with said X-ray fluoroscopic image projected in a lead tip direction to extract a position of a solder joint as an object to be inspected, and said X-ray fluoroscopic image is evaluated every solder joint in accordance with the postion information to effect a defect detection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.