Process gas distribution system and method
US5497316A · kind A · utility
63Cited by
14References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 1995 |
| Grant date | Mar 5, 1996 |
| Priority date | — |
| Expiry date | Apr 4, 2015 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2270/0518
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Gas flow control units in cabinet are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. The flow control units are adapted to deliver process gas selectively from one of two supply tanks to any one or all of four different tool locations. Simple, fast, low-cost purging of the gas delivery conduits is provided to facilitate maintenance, gas cylinder changes, etc. Means are provided to enable pulse purging of the long gas delivery conduit from the cabinet to the tool when flow-through or other purging is not possible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.