Plasma asher with microwave trap
US5498308A · kind A · utility
27Cited by
13References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 25, 1994 |
| Grant date | Mar 12, 1996 |
| Priority date | — |
| Expiry date | Feb 25, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap proximate the opening through which the plasma tube exits the microwave cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.