Micromechanical modulator
US5500761A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1994 |
| Grant date | Mar 19, 1996 |
| Priority date | — |
| Expiry date | Jan 27, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which consists of at least one layer, and a substrate, spaced to form an air gap. The layers of the membrane are characterized in that there is a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. Bias is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.