Doppler velocimeter and position information detection apparatus for use with objects having variations in surface depth
US5502466A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1994 |
| Grant date | Mar 26, 1996 |
| Priority date | — |
| Expiry date | Jun 28, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A position information detection apparatus includes a first detection system for radiating two collimated light beams onto an object to be measured at a predetermined crossing angle to form interference fringes at a predetermined interval, and detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval, a second detection system for radiating two light beams onto the object to be measured at a predetermined crossing angle to form interference fringes having a gradient with each other in an opposing direction to the object to be measured, and detecting scattered light emanating from the object to be measured by the interference fringes having the gradient, and a detection unit for comparing output signals from the first and second detection systems, and detecting relative position information, along the opposing direction of the first and second detection systems, of the object to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.