Directional atomic force microscope and method of observing a sample with the microscope
US5503010A · kind A · utility
91Cited by
1References
9Claims
0Family size
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Key dates
| Filing date | Nov 9, 1994 |
| Grant date | Apr 2, 1996 |
| Priority date | — |
| Expiry date | Nov 9, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.